Meyer Burger

Wire Saw DS 264/4
Technical specification
for precision slicing – fast and efficient
Meyer + Burger AG Alte Bernstrasse 146, P.O. Box 56 3613 Steffisburg (Switzerland) Phone ++41 (0) 33 439 05 05 Fax ++41 (0) 33 439 05 10 sales@meyerburger.ch www.meyerburger.ch

Wire Saw DS 264/4
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1
Applications....................................................................................................................... 4
1.1 Machine concept ......................................................................................................................4
2
Technical data ................................................................................................................... 5
2.1 2.2 2.3 2.4 2.5 2.6 2.7 Workpiece dimensions .............................................................................................................5 Wire ..........................................................................................................................................5 Wire guides ..............................................................................................................................5 Wire deflection rolls ..................................................................................................................5 Cutting feed ..............................................................................................................................6 Slurry supply.............................................................................................................................6 Control......................................................................................................................................6
3
Dimensions and utility connection data.......................................................................... 7
3.1 3.2 3.3 3.4 3.5 3.6 3.7 Dimensions and weight ............................................................................................................7 Electric energy..........................................................................................................................7 Compressed air ........................................................................................................................7 Air exhaust ...............................................................................................................................7 Cooling water ...........................................................................................................................7 Machine layout .........................................................................................................................8 Setting up variants....................................................................................................................9
4
Machine design, essential characteristics, advantages .............................................. 10
4.1 Machine modules ...................................................................................................................10
4.1.1 Machine base and feed module...................................................................................................10 4.1.2 Wire tensioning system................................................................................................................ 10 4.1.3 Wire guide rolls ............................................................................................................................ 10
4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9
Slurry unit ...............................................................................................................................11 Slurry supply...........................................................................................................................11 Corrosion................................................................................................................................11 Handling system .....................................................................................................................11 Control....................................................................................................................................11 Operation................................................................................................................................11 Security ..................................................................................................................................11 Options ...................................................................................................................................12
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Wire Saw DS 264/4
1
Applications
The Wire Saw DS 264-4 is designed specific to cut thin solar wafers. The design concept is fundamentally different than that of previous Wire Saws. The purpose is not a high throughput but to achieve essential more wafers at low cutting cost (higher yield & lower wafer cost).
1.1
Machine concept
The symmetrical machine design with high mechanical and thermal stability guarantees high wafer quality. The easy access to the workpieces, wire guide rolls and wire reels is guaranteed. The autonom slurry unit permits a rapid slurry exchange with little contamination as well as maintaining a constant slurry temperature. The main features of the slurry unit are: ? large cooling capacity ? efficient heat exchanger ? the quantity of slurry adapted to the process ? possibility to put the slurry supply locally The possibility of varying the following parameters ensure the machining process with high repeat accuracy: ? wire tension ? cutting feed rate ? wire feed ? slurry quantity ? slurry temperature All process parameters can be monitored by color TFT. More then 30 values are stored periodical an can be analysed (for example in MS EXCEL). To observe the process the max. allowed deviations of the parameters can be programmed. If these limits are exceeded, a report appears at the screen or in case of upcoming danger the machine immediately stops.
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2
2.1
Technical data
Workpiece dimensions
Cross-section Length Number of workpieces Min. wafer thickness max. 220 × 220 max. 820 mm 1 × 820 mm or 2 × 410 mm, 0.100 mm 1
2.2
Wire
Diameter Length Speed Tension Direction Acceleration Cycle time 0,100 - 0,160 mm up to 640 km at wire dia. 0.160 mm up to 800 km at wire dia. 0.140 mm programmable up to 15 m/s up to 35 N bi-directional traverse or in one direction up to 2 m/s2 programmable
2.3
Wire guides
Diameter Length Weight Number Required power Bearings Axial distance horizontal 320 mm 840 mm 130 kg 2 2 × 47 kW special roller bearings, water-cooled (optional: controlled cooling) 660 mm
2.4
Wire deflection rolls
Diameter Number 160 mm 2×3
1
process has to be adjusted
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Wire Saw DS 264/4
2.5
Cutting feed
Feedrate Fast feedrate Stroke 0 — 10 mm/min, programmable 200 mm/min max. 265 mm
2.6
Slurry supply
Slurry tank Slurry temperature up to 390 l constant within +/- 1 °C 18 °C 1 20 °C 2 max. 160 l/min, adjustable, measured and monitored with a flowmeter monitored through heat exchanger
Capacity Slurry density Slurry cooling
2.7
Control
Type Supplier Monitor / operator panel PLC control with integrated industrial PC Siemens color TFT active matrix 10.4“ with membrane keyboard.
1
Example 1: Example 2:
Cross-section: 156 × 156 mm; length: 800 mm; wire diameter: 0,120 mm; wafer thickness: 0,200 mm; pitch: 0,350 mm; temperature cooling water inlet: 16 °C Cross-section: 156 × 156 mm; length: 800 mm; wire diameter: 0,120 mm; wafer thickness: 0,160 mm; pitch: 0,310 mm; temperature cooling water inlet: 14 °C
2
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3
3.1
Dimensions and utility connection data
Dimensions and weight
Length / width / height (with open doors and electrical cabinet) Weight of the machine Weight of the slurry unit Total weight of the machine 5’183 × 2’524 × 3’408 mm approx. 15’600 kg approx. 750 kg approx. 16’350 kg
3.2
Electric energy
Voltage / frequency Maximum power consumption 3 × 400 V / 50 Hz ; 3 × 480 V / 60 Hz max. 135 kW 95 kW 1 105 kW 2 integrated
UPS system
3.3
Compressed air
Pressure Quantity 6 — 8 bar ca. 20 m3/h
3.4
Air exhaust
Quantity ca. 500 m3/h
3.5
Cooling water
Requirement of water Temperature difference inlet/outlet Pressure min. / max. 200 l/min 1 200 l/min 2 ~ 6 °C 1 ~ 6 °C 2 2 - 5 bar (between water supply and water return must be a difference of >1.5 bar) 84 kWh 1,2
Cooling capacity
1
Example 1: Example 2:
Cross-section: 156 × 156 mm; length: 800 mm; wire diameter: 0,120 mm; wafer thickness: 0,200 mm; pitch: 0,350 mm; temperature cooling water inlet: 16 °C Cross-section: 156 × 156 mm; length: 800 mm; wire diameter: 0,120 mm; wafer thickness: 0,160 mm; pitch: 0,310 mm; temperature cooling water inlet: 14 °C
2
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Wire Saw DS 264/4
3.6
Machine layout
(4395)
3024
3408
Fig. 1: Side view
5183 (6017)
Fig. 2: Top view
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2524

3.7
Setting up variants
3700
36315
Fig. 3: 10 machines
3700
36315
Fig. 4: 20 machines
1850
3700
3500
10690
5183
38122
Fig. 5: 40 machines
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Wire Saw DS 264/4
4
4.1
Machine design, essential characteristics, advantages
Machine modules
? Machine base with cutting feed unit. ? Wire tensioning system (each 1 unit at the left and the right of the machine). ? Wire guide rolls with main drive(s). ? Electrical cabinet.
4.1.1
Machine base and feed module ? Machine base as weld design provides high thermal and mechanical stability. ? Cutting feed unit. ? Cutting feed from top to bottom. ? Workpiece fixation: Mechanical by prestressed spring assembly. ? Handling system for ingot loading ? All important parts to assure wafer accuracy are machined at M+B.
4.1.2
Wire tensioning system ? Two wire tensioning units with symmetrically arranged spools on each side of the machine. ? Horizontal position of the wire spools. ? Simple and fast clamping mechanism. ? Digital control of wire tension and winding. ? Wire breakage surveillance. ? The use of available wire reels is possible. ? The exchange of wire reels by means of a handling system for minimal time consumption. ? Protection of bearings against slurry by using purge air.
4.1.3
Wire guide rolls ? Special roller bearings for the fixed- and movable bearings of the wire guide rolls. ? The exchange of wire guide rolls takes < 2h, because the bearings are outside the cutting area. ? The exchange of wire guide rolls by means of a handling system. ? The rolls are made of temperature stabile material. ? Bearings water-cooled and temperature monitored (Option: Cooling temperature controlled). ? The drive motors are synchronized by a special motive power engineering ? The drive engines are synchronized by a special driving technology.
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4.2
Slurry unit
? Simple accessible unit in the machine. ? Round slurry tank. ? Mixing unit. ? Micro filtering of the slurry during cutting process. ? Slurry pump with regulated quantity. ? Heat exchanger to maintain the preselected slurry temperature. ? Automatic slurry exchange after the cutting end is in preparation.
4.3
Slurry supply
? One slurry supply each at the right and the left of the workpiece. ? The slurry quantity is measured and displayed by a flowmeter. ? Flow governor.
4.4
Corrosion
? Completely corrosion free sawing and wire management area allows the use of water-based slurry.
4.5
Handling system
? Handling system for fast loading / unloading of the ingots ? Handling system for the exchange of wire guide rolls and wire spools
4.6
Control
? Siemens control SIMATIC S 7 ? Integrated PC for operation, data storage, data transfer and host connection ? Direct access to the control by telemaintenance ? All software programs developed by MEYER + BURGER AG ? Software extendable to customers requirements ? Integrated UPS system
4.7
Operation
? Color TFT active matrix for display and monitoring of process data ? Preselection of profiles for wire tension, cutting feed rate, wire speed, slurry quantity and temperature to reach the optimum of the cutting process
4.8
Security
? All machine executions are compliant with the state of the art safety system ? CE conformity
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Wire Saw DS 264/4
4.9
Options
? Chiller unit for coolant water supply ? Temperature controlled bearing cooling ? Slurry viscosity measuring system ? Telemaintenance ? OPC-Connection ? Handling system
Specifications subject to change without notice
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