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1.1 Metal 1 Step Thickness/Material Conditions Method/Tool Remark 1.1.1 W deposition 500 nm Fill contact + interconnect 1.1.2 TiN deposition 20 nm Anti-reflective coating DUV

Step Thickness/Material Conditions Method/Tool Remark 1.1.3 Surface oxidation 1.1.4 Photo metal 1 DUV Ti/TiN layer 1.1.5 Etch metal 1 Including 1.1.6 Strip metal 1

1.2 Parametric test M1 Step Thickness/Material Conditions Method/Tool Remark 1.2.1 Alloy PCM M1 1.2.2 Keithley test PCM M1 1.3 M1 planarization Step Thickness/Material Conditions Method/Tool Remark 1.3.1 SACVD / TEOS deposition 0.45 + 2.0 μm

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